Nom de l'entreprise / du laboratoire: Laboratoire des Technologies de la Microélectronique

The aim of this postdoctoral contract is to develop plasma etching processes to improve the current fabrication process for a Bayer grid of colored filters. The Bayer grid is a mosaic of colored filters placed on the photoelectric cells of a photographic sensor, enabling colors to be separated and then reproduced on the image. The reduction in the size of these filters makes their fabrication more and more complex, especially as controlling the roughness of the colored pixels becomes critical at high resolution. This has led to two main problems: i) at the end of the process used to obtain the Bayer grid, the surface of the grid containing different colored resin dots is not flat, ii) the green resin dots obtained after the standard optical process are tapered, which introduces problems during the subsequent optical printing stages of the red and blue resins. LTM has the expertise and equipment needed to successfully develop plasma processes for flattening the surface of the Bayer grid and structuring the green colored resins with smooth, anisotropic sidewalls.